Method for plating film on a transmission mechanism
OwnerYu-Hsueh Lininventor
Life of this patent
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Abstract
A method for plating films on a transmission mechanism includes the steps of: cleaning the transmission mechanism; injecting hydrogen and tetra-methylsilane gases and applying an electric current to generate a bias electric field within a working chamber, thereby forming an adherent film on the transmission mechanism; injecting hydrocarbon gas together with the hydrogen and tetra-methylsilane gases into the working chamber, thereby forming a mixed film on the adherent film; and injecting the hydrogen and tetra-methylsilane gases together with hydrocarbon gas into the working chamber while maintaining the bias electric field at 400-700 V and the applied electric current at 800-1500 watt, thereby forming a noncrystalline DLC film on the mixed film.
Claims15
A method for plating film on the external surface of a transmission mechanism comprising the steps of:
- (a) preparing the transmission mechanism;
- (b) cleaning the external surface of the transmission mechanism;
- (c) disposing the transmission mechanism into a working chamber, injecting hydrogen and tetra-methylsilane [TMS;
- Si(CH3)4] gases therein and applying an electric current with a power of 800-1500 watt to generate a bias electric field within the working chamber, thereby forming an adherent film on the external surface of the transmission mechanism, wherein the bias electric field is maintained at 400-700 V;
- (d) injecting hydrocarbon gas together with the hydrogen and tetra-methylsilane gases into the working chamber while maintaining the bias electric field at 400-700 V and the applied electric current at 800-1500 watt, thereby forming a mixed film on an external surface of the adherent film, wherein the mixed film consisting of noncrystalline DLC (diamond-like carbon) material and composition of the adherent film, the mixed film having a distal portion that is spaced farthermost from the transmission mechanism and that consists of larger noncrystalline DLC (diamond-like carbon) material when compared to the remaining portion of the mixed film;
- and
- (e) injecting the hydrogen and tetra-methylsilane gases together with hydrocarbon gas into the working chamber while maintaining the bias electric field at 400-700 V and the applied electric current at 800-1500 watt, thereby forming a noncrystalline DLC film on the mixed film.
Dependencies are inferred from the claim text.