Boundary layer disruptive preconditioning in atmospheric-plasma process
AssigneeSigma Laboratories of Arizona, Inc.
InventorsXin Dai, Richard Ellwanger, Angelo Yializis
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Abstract
The boundary layer of a substrate is exposed to a low-energy inert-gas atmospheric plasma that disrupts the layer's bonds, thereby permitting the removal of most oxygen from the surface of the substrate. The substrate is then passed through an exhaust section to remove the disrupted boundary layer prior to conventional plasma treatment. The subsequent plasma treatment is carried out in conventional manner in a substantially oxygen-free environment. As a result of the invention, the high surface-energy levels provided by plasma treatment are more lasting and plasma applications requiring a substantially oxygen-free environment are more efficient.
Claims7
A method of plasma treating comprising the following steps:
- exposing a substrate to a disruptive plasma electrode operating in an inert-gas atmosphere;
- passing the substrate through an exhaust section connected to a gas-removal device;
- and
- immediately exposing the substrate to a plasma-treatment electrode operating in a gas atmosphere selected for a particular application of interest.
A plasma treater comprising:
- a disruptive plasma electrode connected to a source of inert plasma gas and facing a substrate undergoing treatment;
- an exhaust section adjacent to the disruptive plasma electrode and connected to a gas-removal device so as to provide exhaustion of gases over the substrate;
- a plasma-treatment electrode connected to a source of gas selected for a particular application of interest and facing the substrate, said plasma-treatment electrode being adjacent to the exhaust section for immediate plasma treatment of the substrate after exposure to the exhaust section;
- and
- means for energizing the disruptive plasma electrode and the plasma-treatment electrode at different energy levels.
Dependencies are inferred from the claim text.