Method for Manufacturing an Optical Waveguide Layer
OwnerNancy Bollwahn, Ulrike Schulz +2inventors
InventorsNancy Bollwahn, Ulrike Schulz, Peter Munzert, Norbert Kaiser
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Abstract
A method for manufacturing an optical waveguide layer includes a substrate that is prepared, onto which a first part-layer is first grown. Subsequently, a second part-layer of the waveguide layer, consisting of the same material as the first part-layer, is grown on the first part-layer. The second part-layer is bombarded with ions as it grows. The method permits manufacturing optical waveguide layers on temperature-sensitive polymer substrates.
Claims20
A method of manufacturing an optical waveguide layer, the method comprising:
- providing a substrate;
- growing a first part-layer of the waveguide layer over the substrate;
- and
- growing a second part-layer of the waveguide layer, on top of the first part-layer, wherein the second part-layer is bombarded with ions as it grows, the first part-layer and the second party-layer consisting of the same material.
A method of manufacturing an optical waveguide layer, the method comprising:
- providing a polymer substrate;
- growing a first part-layer of the waveguide layer over the substrate, the first part-layer comprising tantalum pentoxide;
- and
- growing a second part-layer of the waveguide layer over the first part-layer, wherein the second part-layer is bombarded with argon and/or oxygen ions during the growing, the second part-layer comprising tantalum pentoxide that is thicker than the first part-layer.
Dependencies are inferred from the claim text.