Manufacturing apparatus and manufacturing method for alined carbon nanotubes

A method of producing carbon nanotubes aligned in a direction perpendicular to the catalyst film surface of a substrate by supplying a reducing gas, a feedstock gas, and a catalyst activating material to the inside of a reaction chamber for accommodating the substrate with a metal catalyst film including;

• a first step of placing the substrate in the reaction chamber,
• a second step of supplying a reducing gas into the reaction chamber in which the substrate is placed, and
• a third step of supplying the feedstock gas and the catalyst activating material into the reaction chamber in which the substrate is placed, wherein
• in the third step, the feedstock gas and the catalyst activating material are supplied from a plurality of ejection holes placed at positions facing the catalyst film surface of the substrate with the ejecting direction thereof being
• adjusted to the direction of alignment of the carbon nanotube grown from the metal catalyst film.