Spin coater, temperature controlling method of the same, optical disc production apparatus, and optical disc production method
AssigneeRicoh Company, Ltd.
InventorYukitoshi Tajima
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AssigneeRicoh Company, Ltd.
InventorYukitoshi Tajima
Estimating the term…
The present invention provides a spin coater including a rotation table that rotatably holds the disc substrate, a spin-cup that surrounds the outer circumference of a disc substrate held on the rotation table, a dripping unit configured to drip an ultraviolet-curable resin composition onto the surface of the disc substrate, a rotating unit configured to rotate the disc substrate via the rotation table to spread the ultraviolet-curable resin composition over the surface of the disc substrate, a heating unit configured to heat the ultraviolet-curable resin composition on the disc substrate, and a temperature controlling unit configured to control a reaching temperature of the spin cup which is increased by the heating unit each time the ultraviolet-curable resin composition is spread, so as to be constant over multiple spin coating processes.
A spin coater comprising:
A method for controlling the temperature of a spin coater having a spin cup that surrounds the outer circumference of a disc substrate held on a rotation table, the method comprising:
(canceled)
An optical disc production apparatus comprising:
(canceled)
Dependencies are inferred from the claim text.