Loading patent…
AssigneeHitachi Cable, Ltd.
InventorsTakashi Ando, Nobuaki Kitano, Akihiro Miyauchi, Ryuta Washiya, Kazumasa Ohsono, Akihito Hongo, Tsuneo Shiota
Estimating the term…
The present invention can provide a stamper for minute structure transfer to be excellent in durability. The present invention is characterized by which a minute pattern as formed in one side of a substrate comes in contact with a material to be transferred and the minute pattern is transferred on a resin layer of a surface of the material to be transferred. At least one layer of a thin film is mounted on at least one side of both surfaces of the substrate, the substrate and the thin film are different in a coefficient of linear expansion each other, and the substrate is curved to swell up to be convex in the side of the minute pattern by an internal stress generated in the thin film.
A stamper for minute structure transfer by which a minute pattern as formed in one side of front and rear surfaces of a substrate comes in contact with a material to be transferred and the minute pattern is transferred on a resin layer of a surface of the material to be transferred,
In a method for manufacturing a stamper for minute structure transfer,
A method for manufacturing a stamper for minute structure transfer,
Dependencies are inferred from the claim text.