Gs Abatement
AssigneeEdwards Limited
InventorJames Robert Smith
Life of this patent
Estimating the term…
Abstract
Low-cost apparatus is described for treating an effluent fluid stream from a process tool. In one embodiment, the apparatus comprises an abatement device (12) and a liquid ring pump (14) for at least partially evacuating the abatement device (12). During use, the abatement device (12) converts one or more components of the effluent stream, for example F2 or a PFC, into one or more liquid-soluble a compounds, for example HF, that are less harmful to the environment. The liquid ring pump (14) receives the effluent stream and a liquid, and exhausts a solution of the liquid and the liquid-soluble component of the effluent stream. The liquid ring pump (14) thus operates as both a wet scrubber and an atmospheric vacuum pumping stage.
Claims39
An apparatus for treating an effluent gas stream from a process tool, the apparatus comprising an abatement device for converting a component of the effluent stream into a liquid-soluble component at a sub-atmospheric pressure, a pump for at least partially evacuating the abatement device, and means for conveying a liquid to the pump, the pump comprising a pumping mechanism, means for receiving the effluent stream from the abatement device and the liquid from the liquid conveying means, and an outlet for exhausting a solution comprising the liquid and the liquid-soluble component of the gas stream.
A system for evacuating a process chamber, the system comprising a vacuum pump for drawing an effluent fluid stream from the chamber and an apparatus for receiving and treating the effluent stream exhaust from the pump, the apparatus comprising an abatement device for converting a component of the effluent stream into a liquid-soluble component at a sub-atmospheric pressure, a pump for at least partially evacuating the abatement device, and means for conveying a liquid to the pump, the pump comprising a pumping mechanism, means for receiving the effluent stream from the abatement device and the liquid from the liquid conveying means, and an outlet for exhausting a solution comprising the liquid and the liquid-soluble component of the gas stream.
A method of treating an effluent gas stream from a process tool, the method comprising the steps of conveying the effluent stream to an abatement device for converting a component of the effluent stream into a liquid-soluble component at a sub-atmospheric pressure, conveying the effluent stream from the abatement device to a pump for at least partially evacuating the abatement device, simultaneously conveying to the pump a liquid, and exhausting from the pump the liquid containing the liquid-soluble component of the gas stream.
Dependencies are inferred from the claim text.