Bearing system or a sealing system using a carbon based sliding member
AssigneeEbara Corporation
InventorsKenichi Sugiyama, Hiroshi Nagasaka
Life of this patent
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Abstract
An object of the present invention is to provide a bearing system or a sealing system which has excellent durability when used with the purified water as a lubricating liquid. The present invention relates to a purified water-lubricated bearing system or a purified water-lubricated sealing system having a movable member and a stationary member, in which purified water having an electrical resistance in a range of 1-18.25 MΩcm is used as a lubricating liquid. The bearing system or the sealing system is characterized in that a diamond-like carbon film is formed over a slide surface of at least one of said movable member and said stationary member.
Claims10
A bearing system or a sealing system having a movable member and a stationary member, in which purified water having an electrical resistance in a range of 1-18.25 MΩcm is used as a lubricating liquid, said bearing system or said sealing system characterized in that a diamond-like carbon film is formed over a slide surface of at least one of said movable member and said stationary member.
A bearing system or a sealing system having a movable member and a stationary member, in which purified water having an electrical resistance in a range of 1-18.25 MΩcm is used as a lubricating liquid, said bearing system or said sealing system characterized in that a polycrystalline diamond film is formed over a slide surface of at least one of said movable member and said stationary member.
Dependencies are inferred from the claim text.