Probe mark inspection
AssigneeRudolph Technologies, Inc.
InventorsRodney Doe, John T. Strom
Life of this patent
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Abstract
Probe mark inspection involves a recipe based on unique image characteristics or combinations of unique image characteristics. Result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast.
Claims17
A method of creating a recipe involving creating one or more inspection result images, each inspection result image being based on a unique image characteristic or a unique combination of image characteristics, whereafter each of the one or more inspection result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast for subsequent inspection images.
An optical inspection method for analyzing contact between conductive probes and bond pads on a semiconductor device, comprising:
- accessing an image of the bond pads having probe marks formed thereon;
- processing the image according to a predetermined recipe for identifying the probe marks;
- identifying locations for the probe marks from the processed image;
- and
- determining potential adjustments between the conductive probes and the semiconductor device as a function of the locations of the probe marks.
Dependencies are inferred from the claim text.