Actuator using piezoelectric element and method of driving the same
AssigneesSamsung Electronics Co., Ltd., Kyungwon Ferrite Ind. Co., Ltd.
InventorsYoung-min Cheong, Kyoung-woo Lee, Jae-hwan Kwon, Hyoung-Jong So, Hong-hee Kim
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Abstract
An actuator using a piezoelectric element and a method of driving the same. The actuator includes at least one piezoelectric cell moving by displacement according to an input voltage, at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell, an error detector detecting an error in the at least one piezoelectric sensor, and a feedback signal generator generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing.
Claims21
An actuator using a piezoelectric element, the actuator comprising:
- at least one piezoelectric cell moving by displacement according to an input voltage;
- at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell;
- an error detector detecting an error in the at least one piezoelectric sensor;
- and
- a feedback signal generator generating a feedback signal corresponding to the error.
A method of driving an actuator, the method comprising:
- moving a piezoelectric cell by displacement;
- detecting an error in a piezoelectric sensor that is interlocked to the piezoelectric cell according to the displacement of the piezoelectric cell;
- and
- generating a feedback signal by using the error.
A holography information storage apparatus recording/reproducing holography information and having an actuator, the actuator comprising:
- a micromirror;
- a plurality of piezoelectric cells driving the micromirror;
- a controller controlling a displacement of the plurality of piezoelectric cells;
- a plurality of piezoelectric sensors sensing the displacement of the plurality of piezoelectric cells;
- an error detector detecting an error in the displacement of the plurality of piezoelectric cells according to the sensing of the displacement of the plurality of piezoelectric cells;
- and
- a feedback signal generator generating a feedback signal according to the detected error,
- wherein the controller controls the displacement of the plurality of piezoelectric cells according to the feedback signal.
Dependencies are inferred from the claim text.