Image Measuring Apparatus and Computer Program

A computer program executable with an image measuring apparatus for measuring a shape of a measurement object based on an image obtained by applying light onto a stage having the measurement object placed thereon and performing image formation of transmitted light or reflected light of the light on an imaging device, the computer program causing a computer to realize a function of the image measuring apparatus, the image measuring apparatus comprising:

• a feature quantity information storing unit configured to store feature quantity information inherent in the shape of the measurement object in association with information on measurement conditions of the measurement object;
• a displaying unit configured to display, within a range of a field of view, the image of the measurement object obtained by performing image formation on the imaging device;
• a feature quantity information extracting unit configured to extract feature quantity information based on the image of the measurement object;
• a determining unit configured to determine whether feature quantity information approximately in agreement with the extracted feature quantity information is stored;
• and
• a measuring unit configured to measure the shape of the measurement object if it is determined in the determining unit that the feature quantity information approximately in agreement is stored, based on the information on the measurement conditions stored in association with the feature quantity information.