Printhead Integrated Circuit Having Glass Nozzle Chambers
AssigneeSilverbrook Research Pty Ltd
InventorKia Silverbrook
Life of this patent
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Abstract
A printhead integrated circuit includes a silicon substrate; a CMOS layer having drive and control circuitry; a passivation layer covering the CMOS layer; and nozzle assemblies disposed on the passivation layer. Each nozzle assembly includes a nozzle chamber having a nozzle opening and a droplet ejection actuator associated with each of the chambers. The droplet ejection actuator is electrically connected to the drive circuitry and adapted to eject a droplet of the ejectable liquid from the nozzle opening. Each chamber comprises a roof and sidewalls extending from the passivation layer to the roof. The roof and sidewalls are both comprised of a glass material.
Claims5
A printhead integrated circuit comprising:
- a silicon substrate;
- a CMOS layer disposed on said silicon substrate, said CMOS layer comprising drive and control circuitry;
- a passivation layer covering said CMOS layer;
- and
- a plurality of nozzle assemblies disposed on said passivation layer, each nozzle assembly comprising:
- a nozzle chamber for containing an ejectable liquid, said nozzle chamber having a nozzle opening defined therein;
- and
- at least one droplet ejection actuator associated with each of the chambers respectively, the droplet ejection actuator being electrically connected to the drive circuitry and adapted to eject a droplet of the ejectable liquid from the nozzle opening,
- wherein each chamber comprises a roof and sidewalls extending from said passivation layer to said roof, wherein said roof and said sidewalls are both comprised of a glass material.
Dependencies are inferred from the claim text.