Filter, duplexer and communication apparatus
AssigneeFujitsu Limited
InventorsShinji TANIGUCHI, Tokihiro Nishihara, Tsuyoshi Yokoyama, Masafumi Iwaki, Motoaki Hara, Takeshi Sakashita, Masanori Ueda
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AssigneeFujitsu Limited
InventorsShinji TANIGUCHI, Tokihiro Nishihara, Tsuyoshi Yokoyama, Masafumi Iwaki, Motoaki Hara, Takeshi Sakashita, Masanori Ueda
Estimating the term…
A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.
A filter comprising a plurality of piezoelectric thin film resonators, the piezoelectric thin film resonators each comprising:
A duplexer comprising a transmission filter and a reception filter, the transmission filter and/or reception filter comprise a plurality of piezoelectric thin film resonators,
A communication apparatus comprising a transmission filter and a reception filter, the transmission filter and/or reception filter comprise a plurality of piezoelectric thin film resonators,
Dependencies are inferred from the claim text.