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US 2010/0060302 A1Published application
Semiconductor device and method for measuring analog channel resistance thereof
AssigneeDongbu HiTek Co., Ltd.
InventorChang Soo JANG
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Abstract
A semiconductor device and a method for measuring an analog channel resistance thereof are provided. The semiconductor device includes a substrate, a gate insulating layer and a gate formed on the substrate, a source and a drain formed in the substrate and at both sides of the gate, a source sense connected to the source, and a drain sense connected to the drain.
Claims7
A semiconductor device, comprising:
- a substrate;
- a gate insulating layer and a gate formed on the substrate;
- a source and a drain formed in the substrate and at both sides of the gate;
- a source sense connected to the source;
- and
- a drain sense connected to the drain.
3 more elements
3-6. (canceled)
A method for measuring an analog channel resistance of a semiconductor device, the method comprising:
- setting a predetermined measuring condition;
- applying a first drain voltage (Vd1) to a drain of the semiconductor device;
- measuring a first drain current (Id1) after applying the measuring condition;
- measuring a first drain sense voltage (Vdm1) of a drain sense coupled to the drain under the condition that a current of the drain sense is constrained to zero Ampere;
- measuring a first source sense voltage (Vsm1) of a source sense coupled to a source of the semiconductor device under the condition that a current of the source sense is constrained to zero Ampere;
- applying a second drain voltage (Vd2) to the drain, the second drain voltage (Vd2) being different from the first drain voltage (Vd1);
- measuring a drain current (Id2) after applying the measuring condition;
- measuring a second drain sense voltage (Vdm2) of the drain sense under the condition that a current of the drain sense is constrained to zero Ampere;
- measuring a second source sense voltage (Vsm2) of the source sense under the condition that a current of the source sense is constrained to zero Ampere;
- and
- measuring an analog channel resistance (Rch) using the measured values of Vdm1, Vsm1, Vdm2, Vsm2, Id1, and Id2.
8 more elements
Dependencies are inferred from the claim text.