Back to results
US 2010/0060260 A1Published application
Measurement sensor, method for analyzing a nonpolar liquid, method for manufacturing a measurement sensor
AssigneeRobert Bosch GmbH
InventorsAndreas KRAUSS, Gottfried FLIK
Life of this patent
Estimating the term…
Abstract
A measurement sensor for analyzing a nonpolar liquid contains a field effect transistor that has an exposed gate contact for wetting with the nonpolar liquid, and an electrical shield that surrounds the gate contact and has openings for inflow and outflow of the nonpolar liquid.
Claims11
A measurement sensor for analyzing a nonpolar and nonconductive liquid, comprising:
- a field effect transistor having an exposed gate contact for wetting with the liquid;
- and
- an electrical shield surrounding the gate contact and having openings for inflow and outflow of the liquid.
A method for analyzing a nonpolar and nonconductive liquid, the method comprising:
- sensing a conductivity of a current channel of a field effect transistor whose gate dielectric is wetted by the liquid.
A method for manufacturing a measurement sensor, comprising:
- patterning drain and source regions in a semiconductor substrate;
- depositing a gate dielectric above a gate channel defined by the drain and source regions;
- making contact to the drain and source regions;
- burying the gate dielectric in a sacrificial material;
- depositing a conductive semiconductor layer on the sacrificial material above the gate dielectric;
- introducing openings into the conductive semiconductor layer in order to form an electrical shield;
- and
- under-etching the conductive semiconductor layer in order to expose the gate dielectric.
5 more elements
Dependencies are inferred from the claim text.