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US 2010/0060104 A1Published application
Piezoelectric transistor and method of manufacturing same
AssigneeDongbu HiTek Co., Ltd.
InventorEun-Soo Jeong
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Abstract
A piezoelectric transistor including a substrate, such as a semiconductor substrate. The substrate may include a cavity and the cavity may be etched downward. A piezoelectric transistor may include piezoelectric material formed over the semiconductor substrate in a cantilever form, and may be elastically strained up and/or down. A piezoelectric transistor may include metal material electrically connected to the piezoelectric material by the piezoelectric effect, and metal wiring may supply voltage to piezoelectric material. Methods of fabricating the same are disclosed.
Claims20
An apparatus comprising:
- a substrate;
- a piezoelectric material formed over the substrate;
- a metal material configured to electrically connect to the piezoelectric material by the piezoelectric effect;
- and
- a metal wiring configured to supply voltage to the piezoelectric material.
2 more elements
A method comprising:
- forming a cavity over a substrate;
- depositing a metal material over at least a portion of the cavity;
- depositing a piezoelectric material disconnected from the metal material;
- and
- forming a metal wiring configured to apply voltage to the piezoelectric material.
2 more elements
Dependencies are inferred from the claim text.