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US 2010/0060101 A1Published application
Elastic wave element
AssigneePanasonic Corporation
InventorsYukio Iwasaki, Hiroki Kamiguchi, Yosuke Hamaoka
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Abstract
An elastic wave element includes a piezoelectric substrate, an interdigital electrode provided on the piezoelectric substrate, a silicon oxide film covering the interdigital electrode, and a silicon nitride oxide film provided on the silicon oxide film. A film thickness H of the silicon oxide film and a wave length λ of an elastic wave propagating through the piezoelectric substrate satisfies a relation of H/λ≧0.15. The elastic wave element reduces fluctuation of propagation characteristics of elastic waves, and has high reliability.
Claims5
An elastic wave element comprising:
- a piezoelectric substrate;
- an interdigital electrode provided on the piezoelectric substrate;
- a silicon oxide film covering the interdigital electrode, the silicon oxide film containing argon;
- and
- a silicon nitride oxide film provided on the silicon oxide film,
- wherein a film thickness H of the silicon oxide film and a wave length λ of an elastic wave propagating through the piezoelectric substrate satisfies a relation of H/λ≧0.15.
3 more elements
Dependencies are inferred from the claim text.