Nano-Positioning Electromagnetic Linear Actuator
AssigneeAgency for Science, Technology and Research
InventorsTat Joo Teo, Guilin Yang
Life of this patent
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Abstract
A flexure for an electromagnetic nano-positioning linear actuator having a support and an actuating body, the flexure comprising: a first resilient end for attaching to the support; a second resilient end for attaching to the actuating body; and a substantially rigid intermediate portion located between the first resilient end and the second resilient end.
Claims19
A flexure for an electromagnetic nano-positioning linear actuator having a support and an actuating body, the flexure comprising:
- a first resilient end for attaching to the support wherein the first resilient end bends in a driven direction of the actuating body;
- a second resilient end for attaching to the actuating body wherein the second resilient end bends in the driven direction;
- and
- a substantially rigid intermediate portion located between the first resilient end and the second resilient end, wherein the substantially rigid intermediate portion minimizes bending in the driven direction.
An electromagnetic nano-positioning linear actuator comprising:
- a support;
- an actuating body moveable with respect to the support;
- an electromagnetic assembly connected to the actuating body and the support for moving the actuating body when a current is applied to the electromagnetic assembly;
- and
- at least one flexure comprising
- a first resilient end for attaching to the support wherein the first resilient end bends in a driven direction of the actuating body;
- a second resilient end for attaching to the actuating body wherein the second resilient end bends in the driven direction;
- and
- a substantially rigid intermediate portion located between the first resilient end and the second resilient end, wherein the substantially rigid intermediate portion minimizes bending in the driven direction.
An electromagnetic nano-positioning linear actuator comprising:
- a support;
- an actuating body moveable with respect to the support;
- an electromagnetic assembly connected to the actuating body and the support for moving the actuating body when a current is applied to the electromagnetic assembly, wherein the electromagnetic assembly comprises:
- a first core magnet, a second core magnet, a first shell magnet and a second shell magnet mounted in an arrangement on a frame;
- wherein in the arrangement,
- the first core magnet is in an attracting position to the second core magnet;
- the first shell magnet is in an attracting position to the first core magnet, thereby defining a first air gap between the first shell magnet and the first core magnet;
- and
- the second shell magnet is in an attracting position to the second core magnet thereby defining a second air gap between the second shell magnet and the second core magnet, wherein a coil is disposed in each air gap and the arrangement of the core magnets and the shell magnets generates a common magnetic path;
- and
- at least one flexure comprising
- a first resilient end for attaching to the support wherein the first resilient end bends in a driven direction of the actuating body;
- a second resilient end for attaching to the actuating body wherein the second resilient end bends in a driven direction of the actuating body;
- and
- a substantially rigid intermediate portion located between the first resilient end and the second resilient end, wherein the substantially rigid intermediate portion minimizes bending in the driven direction.
Dependencies are inferred from the claim text.