Imprint apparatus
AssigneeCanon Kabushiki Kaisha
InventorKazuyuki Kasumi
Life of this patent
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Abstract
An imprint apparatus is configured to mold a resin on a substrate by using a mold and to form a pattern of the resin on the substrate. The imprint apparatus includes a holder configured to hold the substrate, the holder having a groove, an exhaust device configured to exhaust a gas in the groove so that the hold can hold the substrate by setting a pressure in the groove to a negative pressure, a supply device configured to supply the gas to the groove, and a controller configured to control the supply device so as to set the pressure in the groove to a positive pressure during molding.
Claims9
An imprint apparatus for molding a resin on a substrate using a mold to form a pattern of a resin on the substrate, the apparatus comprising:
- a holder having a groove and configured to hold the substrate;
- an exhaust device configured to exhaust a gas in the groove so that a pressure in the groove is negative and the holder holds the substrate;
- a supply device configured to supply a gas to the groove;
- and
- a controller configured to control the supply device so that a pressure in the groove is positive during the molding.
An imprint apparatus for molding a resin on a sheet using a mold to form a pattern of a resin on the sheet, the apparatus comprising:
- a holder having a groove and configured to hold the sheet so as to press the sheet to the mold;
- a supply device configured to supply a gas to the groove;
- and
- a controller configured to control the supply device so that a pressure in the groove is positive and the holder is non-contact with the sheet during the molding.
Dependencies are inferred from the claim text.