Method and apparatus for removing material from microfeature workpieces
AssigneeMicron Technology, Inc.
InventorsRodney C. Kistler, Andrew Carswell
Life of this patent
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Abstract
Methods and apparatus for removing materials from microfeature workpieces. One embodiment of a subpad in accordance with the invention comprises a matrix having a first surface configured to support a polishing medium and a second surface opposite the first surface. The subpad in this embodiment further includes a hydro-control agent in the matrix. The hydro-control agent has a hydrophobicity that inhibits liquid from absorbing into the subpad. The hydro-control agent, for example, can be coupling agents that are generally hydrophobic, surfactants that are hydrophobic, or other agents that are compatible with the matrix and at least generally hydrophobic.
Claims10
A method of manufacturing a subpad for removing material from a microfeature workpiece, comprising:
- attaching a hydro-control agent to an inorganic filler material to increase the hydrophobicity of the inorganic filler material;
- mixing a matrix material with the inorganic filler material having the attached hydro-control agent to form a pad mixture;
- and
- forming the pad mixture into a subpad.
Dependencies are inferred from the claim text.