Scribe process monitoring methodology
AssigneeApplied Materials, Inc.
InventorsVicky SVIDENKO, Tzay-Fa (Jeff) Su, Chuck Luu
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Abstract
One embodiment of the present invention sets forth a computer-implemented method for tuning laser scribe parameters during the fabrication of a solar module. The method includes analyzing the visual appearance of a laser scribe to extract various morphological parameters related to the quality of a laser scribe process used to produce the scribe. Based on the morphological parameters, the laser scribe parameters may be modified in-situ to achieve settings that are optimal for performing laser scribing in each layer of the solar module. As a result, laser scribe process cycle time may be minimized while providing better indication of the laser scribe process stability and quality relative to the prior art approaches.
Claims24
A method for in-situ tuning of a scribe process performed on a substrate placed in a process chamber and having a first layer disposed thereon, the method comprising:
- performing a first scribe on the first layer using a first set of scribe parameters;
- analyzing at least a portion of the first scribe to identify one or more morphological parameters, wherein the one or more morphological parameters are dependent on the first set of scribe parameters;
- based on the at least one morphological parameter, modifying the first set of scribe parameters to obtain a second set of scribe parameters;
- and
- performing a second scribe on the first layer using the second set of scribe parameters.
A method of patterning a solar cell device, comprising:
- placing a first substrate having a first layer disposed thereon into a process chamber;
- removing a first region of the first layer using a scribing device;
- forming an image of at least a portion of the first region;
- analyzing the image using a controller to define one attribute of the at least a portion of the first region;
- and
- adjusting at least one scribing device parameter using information received from analyzing the image.
A computer-readable storage medium storing a computer program which, when executed by a processor, performs operations for in-situ tuning of a scribe process performed on a substrate placed in a process chamber and having a first layer disposed thereon, the operations comprising:
- instructing a scribe module to perform a first scribe on the first layer using a first set of scribe parameters;
- analyzing at least a portion of the first scribe to identify one or more morphological parameters, wherein the one or more morphological parameters are dependent on the first set of scribe parameters;
- based on the at least one morphological parameter, modifying the first set of scribe parameters to obtain a second set of scribe parameters;
- and
- instructing a scribe module to perform a second scribe on the first layer using the second set of scribe parameters.
A system for forming a pattern on a solar cell device, comprising:
- a scribing device that is adapted to remove material from a first region of a surface of a first substrate;
- a optical inspection device positioned to view the first region;
- an automation device used to control the position of the first substrate relative to the scribing device;
- and
- a controller that is in communication with the scribing device and the optical inspection device, wherein the controller is adapted to adjust the amount of material removed from a second region of the surface of the first substrate, or a second region from a surface of a second substrate, based on an image of the first region received from the optical inspection device.
Dependencies are inferred from the claim text.