US 2010/0059676 A1 · CHARGED PARTICLE BEAM APPARATUS

Abstract

Disclosed herewith is a charged particle beam apparatus capable of controlling each of the probe current and the objective divergence angle to obtain a desired probe current and a desired objective divergence angle in accordance with the diameter of the subject objective aperture. The apparatus is configured to include an objective aperture between first and second condenser lenses to calculate and set a control value of a first condenser lens in accordance with the diameter of the hole of the objective aperture so as to obtain a desired probe current and calculate a control value of a second condenser lens setting device in accordance with the diameter of the hole of the objective divergence angle and the control value of the second condenser lens setting device, thereby setting the calculated control value for the second condenser lens setting device to control the objective divergence angle.

Claims17

Dependent claims

A charged particle beam apparatus, comprising:

a scanning device that irradiates a desired region on a sample with a primary charged particle beam;
a display device that displays secondary charged particles generated from the region irradiated by the primary charged particle beam as an image;
a first condenser lens that focuses the primary charged particle beam on the sample;
a second condenser lens disposed closer to the sample than the first condenser lens;
an objective aperture disposed between the first and second condenser lenses;
a first lens setting device that sets an excitation value of the first condenser lens;
a second lens setting device that sets an excitation value of the second condenser lens;
and
a controller that controls the second lens setting device to obtain a desired objective divergence angle with respect to a given diameter of the objective aperture.

6 more elements

A charged particle beam apparatus, comprising:

a scanning device that irradiates a desired region of a sample with a primary charged particle beam;
a display device that displays secondary charged particles generated from the desired region irradiated by the primary charged particle beam as an image,
a first condenser lens that focuses the primary charged particle beam on the sample;
a second condenser lens disposed closer to the sample than the first condenser lens;
an objective aperture disposed between the first and second condenser lenses;
a first lens setting device and a second lens setting device used to set an excitation value for the first and second condenser lenses, respectively;
and
a controller that controls the first and second lens setting devices,
wherein the controller controls the second lens setting device according to an initial second control value and subsequently adjusts the second control value so that a difference between the detected focal depth and its setting value converges within a desired range.

6 more elements

Dependencies are inferred from the claim text.

Charged particle beam apparatus

Life of this patent

Charged particle beam apparatus

Life of this patent

Abstract

Claims17