Micro-structured spectral filter and image sensor
AssigneeCommissariat a l'Energie Atomique
InventorYohan Desieres
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Abstract
The invention relates to a spectral filter (100) comprising at least one metal layer (101) structured by a grating of traversing slots (102a to 102e, 103a to 103h). The grating consists of at least two subgratings of traversing slots (102a to 102e, 103a to 103h) intercepting one another perpendicularly.
Claims29
1-27. (canceled)
A spectral filter comprising at least one metal layer structured by a grating of traversing slots, wherein the grating consists of at least two first subgratings of traversing slots intercepting one another perpendicularly.
A method of producing a spectral filter, comprising the following steps:
- forming a grating of slots in a dielectric layer, wherein the grating consists of at least two subgratings of slots intercepting one another perpendicularly,
- depositing a metal layer in the grating of slots formed in the dielectric layer,
- planarising the metal layer.
A method of producing a spectral filter, comprising the steps of:
- depositing a metal layer on a dielectric layer,
- impressing the metal layer forming, in the metal layer, a grating of slots, wherein the grating of slots consists of at least two subgratings of slots intercepting one another perpendicularly,
- etching the metal layer at the level of the slots to make them traversing,
- depositing a dielectric layer on the metal layer,
- planarising said dielectric layer.
Dependencies are inferred from the claim text.