Method for manufacturing a magnetic storage medium
AssigneeUlvac, Inc.
InventorsTadashi Yamamoto, Hiroyuki Yamakawa
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Abstract
A method for manufacturing a magnetic storage medium that improves the flatness of the magnetic storage medium. A storage layer is formed on a substrate. Next, a resist mask is formed above the storage layer. Then, a pit is formed in the storage layer using the resist mask. Afterwards, a non-magnetic layer having a thickness that is in accordance with the depth of the pit is formed in the pit and above the resist mask. Subsequently, the resist mask and the non-magnetic layer formed above the resist mask are removed from the storage layer.
Claims7
A method for manufacturing a magnetic storage medium comprising the steps of:
- forming a magnetic layer on a substrate;
- forming a resist mask above the magnetic layer;
- forming a pit in the magnetic layer using the resist mask;
- forming a non-magnetic layer, which has a thickness that is in accordance with the depth of the pit, in the pit and above the resist mask;
- and
- removing the non-magnetic layer deposited above the resist mask together with the resist mask from the magnetic layer.
Dependencies are inferred from the claim text.