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US 2010/0059475 A1Published application
Method of nanoscale patterning using block copolymer phase separated nanostructure templates
AssigneeNorthwestern University
InventorsChad A. Mirkin, Jinan Chai
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Abstract
A method of forming nanostructures using block copolymer nanostructure templates is disclosed herein. The method includes forming a nanostructure template by patterning a block copolymer on a substrate and allowing the block copolymer to phase separate to form the nanostructure template. The nanostructure template can then be loaded with a nanostructure precursor material. The nanostructure template is removed to form the nanostructure.
Claims9
A method of forming a nanostructure, the method comprising:
- patterning a block copolymer on a substrate, wherein the block copolymer phase separates to form a nanostructure template;
- and
- loading the nanostructure template with a nanostructure precursor material;
- removing the polymer to form the nanostructure.
1 more element
Dependencies are inferred from the claim text.