Textured chamber surface
AssigneeApplied Materials, Inc.
InventorsKarl BRUECKNER, Brian WEST, Hong WANG
Life of this patent
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Abstract
A method of fabricating a process chamber component having a textured surface with raised features. The method comprises providing a process chamber component having a surface, and forming a patterned resist layer on the process chamber component, the patterned resist layer having apertures that expose portions of the surface of the process chamber component therethrough. A textured surface having raised features is formed on the process chamber component by propelling grit particles with a gas that is pressurized to a pressure sufficiently high to cause the grit particles to erode and remove material from the surface.
Claims15
A method of fabricating a process chamber component having a textured surface with raised features, the method comprising:
- (a) providing a process chamber component having a surface;
- (b) forming a patterned resist layer on the process chamber component, the patterned resist layer having apertures that expose portions of the surface of the process chamber component therethrough;
- and
- (c) forming a textured surface having raised features on the process chamber component by propelling grit particles with a gas that is pressurized to a pressure sufficiently high to cause the grit particles to erode and remove material from the surface.
Dependencies are inferred from the claim text.