Method of manufacturing multilayer ceramic substrate having cavity

A method of manufacturing a multilayer ceramic substrate having a cavity, the method comprising:

• preparing a first ceramic laminate having an opening for forming a cavity, and second and third ceramic laminates which are to be provided on a top surface and a bottom surface of the first ceramic laminate, respectively;
• forming a first polymer layer in a region corresponding at least to the opening, on a top surface of the second ceramic laminate, and forming a second polymer layer in a region corresponding at least to the opening, on a bottom surface of the third ceramic laminate;
• laminating the second ceramic laminate such that the first polymer layer is placed under the opening;
• forming a desired multilayer ceramic laminate by laminating the third ceramic laminate such that the second polymer layer is placed on the opening;
• bonding a first constraining layer on one surface of the second ceramic laminate and bonding a second constraining layer on one surface of the third ceramic laminate;
• and
• sintering the multilayer ceramic laminate including the first and second constraining layers.