Piezoelectric pump and fluid transferring system

A fluid transferring system comprising a first valve unit, a piezoelectric pump unit, and a second valve unit in the stated order along a flow direction of a fluid,

• wherein said piezoelectric pump unit includes:
• a first structure including a first piezoelectric element and a first support member that supports said first piezoelectric element;
• and a first substrate and a second substrate that sandwich said first structure, said piezoelectric pump unit has:
• a pump chamber surrounded by said second substrate and said first structure;
• and a first opening and a second opening that are communicated with said pump chamber, and a space is provided so that said first structure flexes in a direction opposite to said pump chamber according to an operation of said first piezoelectric element,
• wherein said first valve unit includes:
• a second structure including a second piezoelectric element and a second support member that supports said second piezoelectric element;
• and said first substrate and said second substrate that sandwich said second structure, and said first valve unit is opened or closed by a part of said second structure becoming out of or into contact with a part of said first substrate or said second substrate according to an operation of said second piezoelectric element, and
• wherein said second valve unit includes:
• a third structure including a third piezoelectric element and a third support member that supports said third piezoelectric element;
• and said first substrate and said second substrate that sandwich said third structure, and said second valve unit is opened or closed by a part of said third structure becoming out of or into contact with a part of said first substrate or said second substrate according to an operation of said third piezoelectric element.