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US 2010/0059115 A1Published application
Coated Substrates and Semiconductor Devices Including the Substrates
AssigneeFirst Solar, Inc.
InventorBenyamin Buller
Life of this patent
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Abstract
A photovoltaic cell can include a substrate having a transparent conductive oxide layer and an antireflective layer. The layers can be deposited by sputtering or by chemical vapor deposition.
Claims18
A method of manufacturing an optical device substrate comprising:
- depositing an antireflective layer on a first surface of the substrate by chemical vapor deposition;
- and
- depositing a transparent conductive layer on a second surface of the substrate by sputtering.
An optical device substrate comprising:
- a substrate;
- a sputtered transparent conductive layer in contact with a first surface of the substrate;
- and
- an antireflective layer in contact with a second surface of the substrate.
1 more element
An optical device substrate comprising:
- a substrate;
- a sputtered transparent conductive layer in contact with a first surface of the substrate;
- an active photovoltaic layer adjacent to the transparent conductive layer;
- and
- an antireflective layer in contact with a second layer of the substrate.
2 more elements
Dependencies are inferred from the claim text.