Interdigitated Back Contact Silicon Solar Cells With Laser Ablated Grooves

A method of fabricating an IBC solar cell, the method comprising:

• diffusing a first dopant into a rear surface of a semiconductor substrate such that first and second spaced-apart diffusion regions of the substrate have a first doping concentration and extends a first depth into the substrate from the rear surface, and are separated by a third diffusion region having a second doping concentration and extending a second depth into the substrate from the rear surface;
• and
• form a plurality of grooves into the rear surface of the semiconductor substrate such that the first diffusion region is separated from the third diffusion region by a first groove, and the second diffusion region is separated from the third diffusion region by a second groove.

A method of fabricating an IBC solar cell, the method comprising:

• diffusing a first dopant into a rear surface of a semiconductor substrate such that first and second spaced-apart diffusion regions of the substrate have a first doping concentration and extends a first depth into the substrate from the rear surface, and are separated by a third diffusion region having a second doping concentration and extending a second depth into the substrate from the rear surface;
• and
• diffusing a second dopant into said third diffusion region such that said first dopant prevents diffusion of said second dopant into said first and second diffusion regions.