Loading patent…
AssigneeNederlandse Organisatie Voor Toegepast-Natuurweten
InventorsFokko Pieter Wieringa, Norbertus Benedictus Koster, Roland van Vliet, Hubert Adriaan van Mierlo
Estimating the term…
The invention relates to a plasma generator (1) for cleaning an object. The plasma generator (1) comprises a plasma chamber (2) and a support structure (6) arranged in the plasma chamber for supporting the object (7) to be cleaned. Further, the plasma generator comprises an electromagnetic shield (5a, 5b, 5c) counteracting a flow of charged plasma particles flowing from a plasma generating region towards the object, and a plasma source (8). In addition, the plasma generator comprises an additional plasma source (9,10) to form a composition of plasma sources that are arranged to generate in the plasma generating region plasmas, respectively, that mutually interact during operation of the plasma generator so as to force plasma particles to flow in a diffusely closed flow path.
A plasma generator for cleaning an object, comprising a plasma chamber, a support structure arranged in the plasma chamber for supporting the object to be cleaned, an electromagnetic shield counteracting a flow of charged plasma particles flowing from a plasma generating region towards the object, and a plasma source, wherein the plasma generator further comprises an additional plasma source to form a composition of plasma sources that are arranged to generate in the plasma generating region plasmas, respectively, that mutually interact during operation of the plasma generator so as to force plasma particles to flow in a diffusely closed flow path, and wherein the generator is arranged for sequentially starting operation of the individual plasma sources.
A method for cleaning an object using a plasma generator, comprising the steps of
Dependencies are inferred from the claim text.