Multi-axis capacitive accelerometer

A multi-axis capacitive accelerometer, comprising:

• a substrate;
• and
• an element structure layer, disposed on the substrate and spaced apart from the substrate by an interval;
• the element structure layer comprising:
• a plurality of anchors, fixed on the substrate;
• a plurality of independent sets of springs, comprising at least a first independent set of springs, a second independent set of springs and a third independent set of springs;
• a first mass, asymmetrically suspended on one of the anchors by means of the first independent set of springs and having a rotation axis along a first direction, so that the mass of the first mass is asymmetrically distributed on a second direction and when the first mass is exerted by a force in a third direction, the first mass rotates about the rotation axis;
• a second mass, suspended on the first mass by means of the second independent set of springs, wherein the second mass senses the acceleration in the first direction or the second direction and moves correspondingly in the first direction or the second direction;
• at least a comb-shaped set of capacitors, disposed at the element structure layer;
• and
• a third mass, suspended at the second mass by means of the third independent set of springs, wherein the third mass moves in a direction perpendicular to a plane which the movement direction of the second mass is on.