Evaporator, evaporation method and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsMikio NAKASHIMA, Yuji KAMIKAWA
Life of this patent
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Abstract
Disclosed are an evaporator, an evaporation method, and a substrate processing apparatus, which can increase the concentration of generated vapor of an organic solvent and efficiently heat the organic solvent. The evaporator includes a fluid tube, a liquid organic solvent supply device for supplying the organic solvent liquid to one end of the fluid tube, and heating units for heating the fluid tube. The fluid tube has a cross section that increases from the one end to the other end. When the organic solvent liquid supplied to one end of the fluid tube is heated, the organic solvent vapor is discharged from the other end of the fluid tube. The substrate processing apparatus includes the above-described evaporator.
Claims16
An evaporator for evaporating an organic solvent, the evaporator comprising:
- a fluid tube;
- a liquid organic solvent supply device to supply organic solvent liquid to one end of the fluid tube;
- and
- a heating unit to heat the fluid tube,
- wherein the fluid tube has a cross section that increases from the one end to the other end, and the organic solvent liquid supplied to the one end of the fluid tube is heated to discharge organic solvent vapor from the other end of the fluid tube.
An evaporation method for evaporating an organic solvent, the method comprising:
- preparing a fluid tube having a cross section that increases from one end to the other end;
- supplying organic solvent liquid to the one end of the fluid tube;
- and
- evaporating the organic solvent liquid supplied to the one end of the fluid tube through heating of the fluid tube to discharge organic solvent vapor from the other end of the fluid tube.
Dependencies are inferred from the claim text.