Spacer arranging method
AssigneeUlvac, Inc.
InventorsTakumi NAMEKAWA, Kouji Hane, Matsudai Masasuke, Sunaga Yoshio, Yuyama Junpei, Suwa Hidenori
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AssigneeUlvac, Inc.
InventorsTakumi NAMEKAWA, Kouji Hane, Matsudai Masasuke, Sunaga Yoshio, Yuyama Junpei, Suwa Hidenori
Estimating the term…
A technique for arranging spacers with no streaks is provided. On columns of a light-shielding zone of a coating object, ejection positions are set and stored as temporary ejection positions in a memory unit. Random numbers of positive or negative real values are generated by a random number generating function. Every time a positive or negative random number is generated, one temporary ejection position and one random number are correlated to each other and stored as a random number coefficient R. Assuming that the coordinate of the temporary ejection position is expressed by (X, Y), a corrected ejection position (X+L×R, Y) is determined by multiplying the stored random number coefficient R with the interval L between the adjacent temporary ejection positions in the same column, and adding the value of the coordinate X to the multiplied value. The determined corrected ejection position is stored.
A method for arranging spacers at a plurality of positions on a light-shielding zone by making an ejection head having a plurality of nozzle holes move relative to a coating object in order to eject an ejection liquid containing the spacers from the nozzle holes to make the ejection liquid land on the light-shielding zone at positions arranged in a lattice fashion on the coating object, the method comprising:
Dependencies are inferred from the claim text.