Array structure of nano materials
AssigneeSeoul National University Research & Development Business Foundation (Snu R&Db Foundation)
InventorYoungtack Shim
Life of this patent
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Abstract
There is provided a novel array structure of nano materials. The array structure may comprise a first set of conductive electrodes, a second set of conductive electrodes and a plurality of first nano material strands protruding from the first conductive electrodes. The first nano material strands may be arranged in a coplanar relationship on a first plane. The array structure may further comprise a plurality of second nano material strands protruding from the second conductive electrodes. The second nano material strands may be arranged in a coplanar relationship on a second plane, which is substantially parallel with the first plane. At least a part of the second nano material strands may extend in a transverse relationship with respect to at least a part of the first nano material strands.
Claims34
An array structure of nano materials, comprising:
- a substrate;
- a first set of conductive electrodes disposed on the substrate;
- a second set of conductive electrodes disposed on the substrate;
- a plurality of first nano material strands protruding from the first conductive electrodes along at least a substantially similar first direction and in a first elevation from the substrate;
- and
- a plurality of second nano material strands protruding from the second conductive electrodes along at least a substantially similar second direction and in a second elevation from the substrate, wherein the second elevation differs from the first elevation by at most several hundreds of nanometers,
- wherein the first and second nano materials are configured to interact with each other when disposed adjacent to a target.
A array structure of nano materials, comprising:
- a first set of conductive electrodes;
- a second set of conductive electrodes;
- a plurality of first nano material strands protruding from the first conductive electrodes, wherein the first nano material strands are disposed in a coplanar relationship on a first plane;
- and
- a plurality of second nano material strands protruding from the second conductive electrodes, wherein the second nano material strands are disposed in a coplanar relationship on a second plane substantially parallel with the first plane,
- wherein at least a part of the second nano material strands extends in a transverse relationship with respect to at least a part of the first nano material strands.
An array structure of nano materials, comprising:
- a substrate;
- a first array of first nano material strands extending along a first direction and being directly/indirectly supported by the substrate;
- a second array of second nano material strands extending along a second direction and being directly/indirectly supported by the substrate;
- at least one first conductive electrode electrically contacting the first nano material strands and being mechanically coupled with the substrate;
- and
- at least one second conductive electrode electrically contacting the second nano material strands and being mechanically coupled with the substrate,
- wherein the first and second strands are disposed in a preset arrangement and spaced apart from each other by at most several hundreds of nanometers so that the first and second strands are configured to interact with each other when disposed adjacent to a target.
A method of preparing an array structure of nano materials, comprising the steps of:
- providing a first layered structure having multiple layers on a substrate, the first layered structure including a layer having first nano material strands therein;
- patterning the first layered structure to define first multiple recesses such that end portions of the first nano material strands and a part of the substrate in registration with the end portions are exposed through the first multiple recesses;
- filling the first multiple recesses with a conductive material to form an intermediate structure;
- providing a second layered structure having multiple layers on the intermediate structure, the second layered structure including a layer having second nano material strands therein;
- patterning the second layered structure to define second multiple recesses such that end portions of the second nano material strands and a part of the substrate in registration with the end portions are exposed through the second multiple recesses;
- and
- filling the second multiple recesses with a conductive material.
Dependencies are inferred from the claim text.