Integrated electro-optic device and method of making

An integrated electro-optic circuit, comprising:

• a node configured to receive a poling voltage;
• a first electrode coupled to the node and to a first driver output;
• and
• an electro-optic stack superjacent the first electrode.

An integrated electro-optic modulator, comprising, disposed on a single semiconductor die:

• a first plurality of pads configured to receive a corresponding first plurality electrically modulated signals;
• a multiplexer operatively coupled to the first plurality of pads and configured to multiplex the first plurality of electrically modulated signals into a second at least one electrically modulated signal fewer in number than the first plurality;
• at least one amplifier operatively coupled to receive the second at least one electrically modulated signal and amplify the second at least one electrically modulated signal to produce at least one driver signal;
• a first high speed electrode having a length and operatively coupled to receive the at least one driver signal at a first end and responsively propagate a corresponding plurality of electrical pulses along its length;
• a planarization layer disposed at least partly coplanar to the first plurality of pads;
• a first polymer input waveguide disposed over the planarization layer and operative to propagate an input light signal;
• a first poled electro-optic organic chromophore active region disposed over the planarization layer and parallel to the first high speed electrode, configured to receive the input light signal from the first polymer input waveguide and, responsive to the electrical pulses propagated along the length of the first high speed electrode, modulate the propagation velocity of the light signal to produce a phase modulated output light signal;
• a first polymer output waveguide disposed over the planarization layer and operative to propagate the phase modulated output light signal;
• and
• a first termination circuit operatively coupled to a second end of the high speed electrode and configured to impedance match the plurality of electrical pulses.

An integrated polymer electro-optic semiconductor circuit, comprising:

• a semiconductor substrate;
• at least one doping layer patterned across the semiconductor substrate;
• at least one conductor layer patterned over the semiconductor substrate;
• a planarization layer disposed at least partly coplanar with the at least one conductor layer;
• a polymer optical stack disposed over the planarization layer;

A method of making an integrated electro-optic modulator, comprising:

• providing a planarized semiconductor integrated circuit including a plurality of ground electrodes operatively coupled to a plurality of semiconductor junctions;
• forming at least a polymer bottom clad layer and an organic hyperpolarizable electro-optic chromophore layer over the planarized semiconductor integrated circuit;
• polling at least portions of the hyperpolarizable electro-optic chromophores arranged adjacent the ground electrodes;
• and
• substantially fixing the orientation of the poled electro-optic chromophores.