Method for using real-time apc information for an enhanced lot sampling engine
AssigneeInternational Business Machines Corporation
InventorsGary W. Behm, Malek Ben Salem, Yue Li
Life of this patent
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Abstract
A method includes passing a lot through a production process and evaluating a statistical quality of the production process. Additionally, the method includes calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value and determining if sampling is indicated. Furthermore, the method includes, if sampling is indicated, performing a measurement process of the lot.
Claims20
A method comprising:
- passing a lot through a production process;
- evaluating a statistical quality of the production process;
- calculating an advanced process control (APC) recipe parameter adjustment (RPA) distribution value;
- determining if sampling is indicated;
- and
- if sampling is indicated, performing a measurement process of the lot.
A computer program product comprising a computer usable medium having readable program code tangibly embodied in the medium, the computer program product includes at least one component operable to:
- pass a lot through a production process;
- evaluate a statistical quality of the production process;
- calculate an advanced process control (APC) recipe parameter adjustment (RPA) distribution value;
- and
- perform a measurement process of the lot, if sampling is indicated.
A system, comprising:
- a wafer processing station;
- an advanced process control (APC);
- and
- an enhanced lot sampling engine (ELSE) in communication with the APC and configured to receive APC recipe parameter adjustment (RPA) information and APC calculated process capability (Cpk) information from the APC, and is further configured to determine a sampling rate for a lot based on historical Cpk information, the APC RPA information from the APC and the APC calculated Cpk information from the APC.
Dependencies are inferred from the claim text.