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US 2009/0293162 A1Published application
Monolithic high aspect ratio nano-size scanning probe microscope (spm) tip formed by nanowire growth
AssigneeInternational Business Machines Corporation
InventorsGuy M. Cohen, Hendrik F. Harmann
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Abstract
A scanning probe where the micromachined pyramid tip is extended by the growth of an epitaxial nanowire from the top portion of the tip is disclosed. A metallic particle, such as gold, may terminate the nanowire to realize an apertureless near-field optical microscope probe.
Claims14
A scanning probe comprising:
- a cantilever;
- a micromachined single-crystal pyramid formed on said cantilever;
- and
- a single-crystal nanowire extending from said top portion of said pyramid, wherein said nanowire is epitaxial with respect to said single-crystal pyramid.
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A scanning probe comprising:
- a cantilever;
- a micromachined single-crystal pyramid formed on said cantilever;
- and
- a highly anisotropic crystalline nanostructure extending from said top portion of said pyramid, wherein a seamless interface is present between said nanostructure and said top portion of said pyramid.
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Dependencies are inferred from the claim text.