Automated throughput control system and method of operating the same
AssigneeAdvanced Micro Devices, Inc.
InventorsGunnar Flach, Thomas Quarg
Life of this patent
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Abstract
An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance during moderately short time intervals. Moreover, the performance characteristics obtained from tool information may be compared to reference data, for instance provided by dynamic simulation calculations, to identify high, as well as low, performing equipment on the basis of standard process control mechanisms.
Claims21
A system, comprising:
- an interface configured to receive process messages form a plurality of process tools;
- a throughput control unit connected to said interface and configured to automatically determine a throughput rate for each of said plurality of process tools under specified process tool parameters and identify a process tool of significance having a determined throughput rate outside a specified range wherein the throughput rate indicates a number of items processed in the associated process tool over a particular time interval;
- and
- a reference data module operable to generate reference data for said specified range of the throughput rate by employing simulation models of said process tools using the specified tool parameters.
(canceled)
10-11. (canceled)
A method, comprising:
- receiving process messages from a plurality of process tools used in a manufacturing process line by a throughput control unit;
- determining a throughput rate for each of said plurality of process tools under specified process tool parameters on the basis of said process messages wherein, the throughput rate indicates a number of items processed in the associated process tool over a particular time interval;
- identifying a process tool of significance having a determined throughput rate outside a specified range;
- and
- generating reference data for said specified range of the throughput rate by employing simulation models of said process tools using the specified tool parameters.
21-22. (canceled)
Dependencies are inferred from the claim text.