Liquid discharge head producing method
AssigneeCanon Kabushiki Kaisha
InventorIsamu Horiuchi
Life of this patent
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Abstract
Three positive-type photosensitive material layers which are photosensitive to light having the same wavelength range are provided on a substrate, and an intermediate layer contains a light-absorbing agent. The ultraviolet absorbing agent contains in the intermediate layer prevents the intermediate layer and lower layer from being exposed during the exposure of an upper layer. After the upper layer is exposed, the intermediate layer and lower layer are exposed with the light having the same wavelength range, which is used to expose the upper layer.
Claims10
A method of producing a liquid discharge head in which a discharge port for discharging a liquid and a liquid flow path communicated with the discharge port are provided, the method comprising the steps of:
- forming a first positive-type photosensitive material layer on a substrate;
- forming a second positive-type photosensitive material layer on the first positive-type photosensitive material layer, the second positive-type photosensitive material layer containing a light-absorbing agent absorbing light having a wavelength to which the first positive-type photosensitive material layer is photosensitive, the second positive-type photosensitive material layer being photosensitive to the light having the wavelength;
- forming a third positive-type photosensitive material layer on the second positive-type photosensitive material layer, the third positive-type photosensitive material layer being photosensitive to the light having the wavelength;
- exposing the third positive-type photosensitive material layer with the light having the wavelength;
- developing the third positive-type photosensitive material layer;
- exposing the second photosensitive material layer and the first positive-type photosensitive material layer with the light having the wavelength;
- developing the second photosensitive material layer and the first photosensitive material layer;
- forming a coating layer on the substrate so as to coat the first photosensitive material layer, the second photosensitive material layer, and the third photosensitive material layer, to which the development has been performed;
- forming the discharge port in the coating layer;
- and
- forming the flow path by removing the first photosensitive material layer, the second photosensitive material layer, and the third photosensitive material layer.
A method of producing a liquid discharge head in which a discharge port for discharging a liquid and a liquid flow path communicated with the discharge port are provided, the method comprising the steps of:
- forming a positive-type photosensitive material layer on the substrate, the positive-type photosensitive material layer containing a light-absorbing agent absorbing light having a wavelength to which the positive-type photosensitive material layer is photosensitive;
- forming another positive-type photosensitive material layer on the positive-type photosensitive material layer containing the light-absorbing agent;
- exposing the other positive-type photosensitive material layer with the light having the wavelength;
- developing the other positive-type photosensitive material layer;
- exposing the positive-type photosensitive material layer containing a light-absorbing agent with the light having the wavelength;
- developing the positive-type photosensitive material layer containing a light-absorbing agent with the light having the wavelength;
- forming a coating layer on the substrate so as to coat the photosensitive material layer containing the light-absorbing agent and the other photosensitive material layer, to which the development has been performed;
- forming the discharge port in the coating layer;
- and
- forming the flow path by removing the photosensitive material layer containing the light-absorbing agent and the other photosensitive material layer.
A method of producing a liquid discharge head in which a discharge port for discharging a liquid and a liquid flow path communicated with the discharge port are provided, the method comprising the steps of:
- preparing a laminated material constituted by a first positive-type photosensitive material layer, a second positive-type photosensitive material layer, and a third positive-type photosensitive material layer, on a substrate, the first positive-type photosensitive material layer among the plural material layers being closest to the substrate, the second positive-type photosensitive material layer being positioned between the first positive-type photosensitive material layer and the third positive-type photosensitive material layer, the second positive-type photosensitive material layer containing a light-absorbing agent absorbing light having a wavelength to which the first positivetype photosensitive material layer is photosensitive, the second positive-type photosensitive material layer being photosensitive to the light having the wavelength, the third positive-type photosensitive material layer being photosensitive to the light having the wavelength;
- exposing the third positive-type photosensitive material layer with the light having the wavelength;
- developing the third positive-type photosensitive material layer;
- exposing the second positive-type photosensitive material layer and the first positive-type photosensitive material layer with the light having the wavelength;
- developing the second photosensitive material layer and the first photosensitive material layer;
- forming a coating layer on the substrate so as to coat the first photosensitive material layer, the second photosensitive material layer, and the third photosensitive material layer, to which the development has been performed;
- forming the discharge port in the coating layer;
- and
- forming the flow path by removing the first photosensitive material layer, the second photosensitive material layer, and the third photosensitive material layer.
Dependencies are inferred from the claim text.