Formation of highly porous gas-sensing layers by deposition of nanoparticles produced by flame spray pyrolysis
OwnerLutz Maedler, Sotiris Pratsinis +4inventors
InventorsLutz Maedler, Sotiris Pratsinis, Albert Roessler, Udo Weimar, Nicolae Barsan, Aleksander Gurlo
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Abstract
The invention relates to a method of producing a gas sensor comprising the steps of a. Positioning a sensor substrate (7) in a flame spray pyrolysis apparatus (1); b. Generating an aerosol phase comprising sensing material nanoparticles by flame spray pyrolysis (FSP) of a precursor substance; c. Depositing the sensing material particles contained in the aerosol, in particular nanoparticles of the sensing material, onto the sensor substrate (7) directly from the aerosol phase to form a porous sensing layer (15).
Claims18
Method of producing a gas sensor comprising the steps of
- a. Positioning a sensor substrate (7) in a flame spray pyrolysis apparatus (1);
- b. Generating an aerosol phase comprising sensing material nanoparticles by flame spray pyrolysis (FSP) of a precursor substance;
- c. Depositing the sensing material particles contained in the aerosol, in particular nanoparticles of the sensing material, onto the sensor substrate (7) directly from the aerosol phase to form a porous sensing layer (15) on the sensor substrate (7).
Sensor fabrication system comprising a flame spray reactor (1), a delivery system, in particular a precursor pump (2) and a precursor supply line connected to a nozzle (3), a flame ring (4) surrounding the nozzle exit and a sensor substrate holder (9) disposed above the nozzle (3).
Dependencies are inferred from the claim text.