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US 2009/0289651 A1Published application
Probe card layout
AssigneeMicron Technology, Inc.
InventorJohn Caldwell
Life of this patent
Estimating the term…
Abstract
Multi-touchdown, parallel test probe cards having probe elements arranged to provide greater efficiency during testing of a substrate having a plurality of die thereon. Probe elements may be arranged in a number of configurations that allow for efficient usage of the probe elements.
Claims28
A parallel test probe card having a plurality of probe elements, wherein:
- each probe element is configured to always test a single die on a substrate having a plurality of die;
- and
- each of the plurality of probe elements is arranged to align with a first half of the plurality of die when the probe card is placed in a first position relative to the substrate and align with a second half of the plurality of die when the probe card is placed in a second position relative to the substrate.
A probe card comprising:
- a first subset of probe elements configured to align with only a first subset of die, wherein the first subset of die comprises peripheral die, wherein the peripheral die comprise each die disposed furthest in a direction opposite a selected direction;
- and
- a second subset of probe elements configured to align with only a second subset of die, wherein the second subset of die comprises peripheral shifted die, wherein the peripheral shifted die comprise the die located m die away from the first subset of die in the direction toward the selected direction.
A probe card comprising:
- a plurality of probe elements configured to simultaneously test a first plurality of die on a substrate, wherein each of the plurality of probe elements is always employed to test a respective one of the first plurality of die on the substrate.
A probe card comprising:
- probe elements, wherein the probe elements are configured to perform a test on a plurality of die on a substrate and the test creates an efficiency ratio of at least 85%, wherein the efficiency ratio is a ratio of probe elements used per test performed.
Dependencies are inferred from the claim text.