Micro-electromechanical resonance device with periodic structure

A micro-electromechanical resonance (MEMS) device comprising:

• a substrate;
• an input electrode to be coupled to an alternating current source;
• an output electrode;
• at least one anchoring structure coupled to said substrate;
• and
• a vibratile structure coupled to said at least one anchoring structure by at least one junction positioned on a vibration node;
• said vibratile structure having a natural acoustic resonant frequency so that a vibration generated when the input electrode is powered, generates an alternating current on the output electrode, the alternating current having an output frequency based upon the natural acoustic resonant frequency;
• at least one of said vibratile structure and said anchoring structure comprising a periodic structure;
• said periodic structure comprising at least first and second zones different from each other, each of the first and second zones respectively having different first and second acoustic propagation properties.

A micro-electromechanical resonance (MEMS) device comprising:

• a substrate;
• at least one anchoring structure coupled to said substrate;
• a vibratile structure coupled to said at least one anchoring structure by at least one junction positioned on a vibration node;
• said vibratile structure having a natural acoustic resonant frequency so that a vibration generates an alternating current having an output frequency based upon the natural acoustic resonant frequency;
• said vibratile structure comprising a periodic structure;
• said periodic structure comprising at least first and second zones different from each other, each of the first and second zones respectively having different first and second acoustic propagation properties.

A micro-electromechanical resonance (MEMS) device comprising:

• a substrate;
• at least one anchoring structure coupled to said substrate;
• and
• a vibratile structure coupled to said at least one anchoring structure by at least one junction positioned on a vibration node;
• said vibratile structure having a natural acoustic resonant frequency, and generating an alternating current having an output frequency based upon the natural acoustic resonant frequency;
• said anchoring structure comprising a periodic structure;
• said periodic structure comprising at least first and second zones different from each other, each of the first and second zones respectively having different first and second acoustic propagation properties.

A method of making micro-electromechanical resonance (MEMS) device comprising:

• forming a substrate;
• coupling at least one anchoring structure to the substrate;
• and
• coupling a vibratile structure to the at least one anchoring structure by at least one junction positioned on a vibration node;
• the vibratile structure having a natural acoustic resonant frequency so that a vibration generates an alternating current having an output frequency based upon the natural acoustic resonant frequency;
• the vibratile structure comprising a periodic structure;
• the periodic structure comprising at least first and second zones different from each other, each of the first and second zones respectively having different first and second acoustic propagation properties.

A method of making a micro-electromechanical resonance (MEMS) method comprising:

• forming a substrate;
• coupling at least one anchoring structure to the substrate;
• and
• coupling a vibratile structure to the at least one anchoring structure by at least one junction positioned on a vibration node;
• the vibratile structure having a natural acoustic resonant frequency so that a vibration generates an alternating current having an output frequency based upon the natural acoustic resonant frequency;
• the anchoring structure comprising a periodic structure;
• the periodic structure comprising at least first and second zones different from each other, each of the first and second zones respectively having different first and second acoustic propagation properties.