Sputtering apparatus and method of manufacturing solar battery and image display device by using the same
AssigneeCanon Anelva Corporation
InventorDaisuke Aonuma
Life of this patent
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Abstract
A sputtering apparatus of a continuous system that a first target 17a and a second target 17b are arranged to obliquely face a substrate 6 and other targets to form a film while conveying the substrate 6 along a conveying path 15, wherein shields 19a, 19b facing the conveying direction of at least the substrate 6 are provided between the conveying path 15 and the first and second targets 17a, 17b to have therebetween an extended region toward the conveying path 15 in the space between the first target 17a and the second target 17b to enable to obtain a high quality film and to enable to prevent particles from diffusing in a chamber 3.
Claims15
A sputtering apparatus, wherein a conveying path for conveying a substrate is disposed in a sputtering chamber to which an exhaust device is connected;
- a first cathode for holding a first target which is obliquely opposed toward the front in the conveying direction of the substrate and a second cathode for holding a second target which is obliquely opposed toward the back in the conveying direction of the substrate are arranged to obliquely face the conveying path;
- and shields opposed to the conveying direction of the substrate are disposed between the conveying path and the first and second cathodes to have therebetween an extended region toward the conveying path in a space between the first target and the second target.
Dependencies are inferred from the claim text.