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US 2009/0288780 A1Published application
Perforated support plate
OwnerAkihiko Nakamura, Atsushi Miyanari +2inventors
InventorsAkihiko Nakamura, Atsushi Miyanari, Yoshihiro Inao, Yasumasa Iwata
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Abstract
To provide a perforated support plate with high rigidity, the perforated support plate for supporting a surface of a wafer by interposing an adhesive layer comprises a reinforcing part for deflection prevention.
Claims7
A perforated support plate for supporting a surface of a wafer by interposing an adhesive layer, comprising
- a reinforcing part for deflection prevention.
Dependencies are inferred from the claim text.