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US 2009/0288593 A1Published application
Electroless deposition system
AssigneeBlue 29, LLC
InventorsRon Rulkens, Robert D. Tas, Shashank Ravindra Kulkarni, Artur Kolics, Nancy E. Gilbert
Life of this patent
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Abstract
An electroless deposition system includes a deposition solution, and saturating the deposition solution with an oxygen concentration in a range from about two thousand parts per million to about twenty thousand parts per million.
Claims20
An electroless deposition system comprising:
- providing a deposition solution;
- and
- saturating the deposition solution with an oxygen concentration in a range from about two thousand parts per million to about twenty thousand parts per million.
An electroless deposition system comprising:
- providing an electroless deposition solution;
- dissolving oxygen with a concentration in a range from about two thousand parts per million to about twenty thousand parts per million in the electroless deposition solution;
- and
- depositing a deposition layer on an outlier feature of a work piece.
1 more element
An deposition system comprising:
- a deposition chamber for a deposition solution;
- and
- a portion of the deposition system for saturating the deposition solution with an oxygen level in a range from about two thousand parts per million to about twenty thousand parts per million.
Dependencies are inferred from the claim text.