Piezoelectric sensor and sensing instrument
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorsJunichiro Yamakawa, Kazuo Akaike, Takeru Mutoh, Hiroyuki Kukita
Life of this patent
Estimating the term…
Loading patent…
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorsJunichiro Yamakawa, Kazuo Akaike, Takeru Mutoh, Hiroyuki Kukita
Estimating the term…
To provide a piezoelectric sensor in which a first electrode for measurement and a second electrode for reference are provided apart from each other on one surface side of a piezoelectric piece and a common electrode is provided on the other surface side so as to face the first and second electrodes, and which achieves highly reliable oscillation by reducing the influence of electrical coupling between the first electrode and the second electrode. A piezoelectric sensor includes: a first electrode for measurement and a second electrode for reference provided apart from each other on one surface side of a piezoelectric piece; a common electrode provided on the other surface side of the piezoelectric piece commonly for the first electrode and the second electrode to face the first electrode and the second electrode; and an adsorption layer formed on an area, of the common electrode, to which the first electrode is projected, to adsorb a substance to be sensed. This structure prevents the first electrode and the second electrode from being electrically coupled due to the impedance of the sample fluid.
A piezoelectric sensor sensing a substance to be sensed in a sample fluid based on a change in natural frequency of a piezoelectric piece by making an adsorption layer formed on an electrode provided on the piezoelectric piece adsorb the substance to be sensed, the piezoelectric sensor comprising:
Dependencies are inferred from the claim text.