Apparatus and methods for using a polishing tape cassette
AssigneeApplied Materials, Inc.
InventorsAntoine P. Manens, Gary C. Ettinger, Paul D. Butterfield, Shou-Sung Chang, Ricardo Martinez, Eashwer Kollata, Robert A. Ewald, Kuldip Sumbria
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Abstract
Methods and apparatus are provided for housing a polishing tape adapted to polish a substrate. The invention includes a cassette comprising a body portion; and a head portion, wherein the head portion includes: a pair of guide walls; one or more supply rollers positioned between the guide walls in the head portion; and wherein the guide walls are adapted to guide a polishing tape housed in the body over the one or more supply rollers. Numerous other aspects are provided.
Claims25
A cassette for housing a polishing tape adapted to polish a substrate, the cassette comprising:
- a body portion;
- and
- a head portion, wherein the head portion includes:
- a pair of guide walls, and
- one or more supply rollers positioned between the guide walls in the head portion,
- wherein the guide walls are adapted to guide a polishing tape housed in the body over the one or more supply rollers.
A system for polishing an edge of a substrate comprising:
- a substrate support adapted to support a substrate;
- a polishing head adapted to press a polishing tape against an edge of the substrate;
- and
- a cassette for housing the polishing tape, the cassette comprising:
- a body portion;
- and
- a head portion, wherein the head portion includes:
- a pair of guide walls;
- one or more supply rollers positioned between the guide walls in the head portion;
- and
- wherein the guide walls are adapted to guide the polishing tape housed in the body over the one or more supply rollers.
A method comprising:
- providing a supply spool including a length of polishing tape;
- routing the length of polishing tape over a supply roller positioned between two walls in a head portion of a cassette;
- and
- providing a take-up spool adapted to receive the length of polishing tape from the supply roller, wherein the supply spool and take-up spool are housed in a body portion of the cassette.
Dependencies are inferred from the claim text.