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US 2009/0263531 A1Published application
Symmetric thermocentric flexure with minimal yaw error motion
AssigneeMassachusetts Institute of Technology
InventorsVijay Shilpiekandula, Kamal Youcef-Toumi
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Abstract
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes one or more optical flats. A flexure arrangement includes a plurality of beam flexures arranged in a symmetric configuration around the one or more optical flats so as to minimize the error yaw motion (θz) from thermal fluctuations associated with fixturing the one or more optical flats.
Claims16
A stamping structure for imprinting micro-sized features comprising:
- one or more optical flats;
- and
- a flexure arrangement having a plurality of beam flexures arranged in a symmetric configuration around said one or more optical flats so as to minimize the error yaw motion (θz) from thermal fluctuations associated with fixturing said one or more optical flats.
A method of forming a stamping structure for imprinting micro-sized features comprising:
- providing one or more optical flats;
- and
- arranging in a symmetric fashion around said one or more optical flats a plurality of beam flexures so as to minimize the error yaw motion (θz) from thermal fluctuations associated with fixturing said one or more optical flats.
Dependencies are inferred from the claim text.