# US 2009/0260981 A1 · Fluorogas generator

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- Number: US 2009/0260981 A1
- Document ID: US20090260981A1
- Status: Published application
- Kind: A1
- Application number: 12/064,704
- Filed: 2006-06-28
- Published: 2009-10-22
- Earliest claimed: 2005-08-25
- Assignees: Toyo Tanso Co., Ltd.
- Inventors: Noriyuki Tanaka; Osamu Yoshimoto; Jiro Hiraiwa; Hiroshi Hayakawa; Tetsuro Tojo
- Web page: https://patentgrep.com/patent/US20090260981A1

## CPC

- C25B 1/245: Fluorine; Compounds thereof
- C25B 15/02: Process control or regulation
- C25B 15/027: Temperature
- C25B 15/08: Supplying or removing reactants or electrolytes; Regeneration of electrolytes
- C25B 15/085: {Removing impurities}
- C25B: ELECTROLYTIC OR ELECTROPHORETIC PROCESSES FOR THE PRODUCTION OF COMPOUNDS OR NON-METALS; APPARATUS THEREFOR (anodic or cathodic protection C23F13/00; single-crystal growth C30B)

## Abstract

A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.

## Claims

### Claim 1

A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, comprising:
a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell;
a normally-closed valve provided in the middle of the raw material supply pipe; and
a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell.

### Claim 2 (depends on 1)

The fluorine/fluoride gas generator according to claim 1, wherein the raw material supply pipe is provided on the cathode chamber side of the electrolytic cell.

### Claim 3 (depends on 1, 2)

The fluorine/fluoride gas generator according to claim 1 or 2, wherein when the normally-closed valve provided in the middle of the raw material supply pipe closes, the normally-open valve provided in the middle of the bypass pipe opens so that the pressure inside the raw material supply pipe and the pressure inside the cathode chamber are balanced.

### Claim 4 (depends on 1, 2)

The fluorine/fluoride gas generator according to claim 1 or 2, wherein a gas to be generated is fluorine or nitrogen trifluoride.